ALD features superb step coverage performance. The SEM images show
SEM pictures showing top views of perovskite films: a before and b
Surface modification and functionalization of powder materials by atomic layer deposition: a review - RSC Advances (RSC Publishing) DOI:10.1039/D1RA00326G
S. Kudelka's research works Infineon Technologies, Neubiberg and other places
ALD: Atomic Layer Deposition – Precise and Conformal Coating for Better Performance
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PDF) Atomic Layer Deposition for advanced DRAM applications
Comparison of step coverage of SrO films deposited with: a PEALD and b
Vapor-Phase Atomic Layer Deposition of Co9S8 and Its Application for Supercapacitors
Enhanced sunlight-absorption of Fe2O3 covered by PANI for the photodegradation of organic pollutants and antimicrobial inactivation - ScienceDirect
Surface modification and functionalization of powder materials by atomic layer deposition: a review - RSC Advances (RSC Publishing) DOI:10.1039/D1RA00326G
ALD: Atomic Layer Deposition – Precise and Conformal Coating for Better Performance
SEM images of the surfaces at different number of ALD cycles on Si(100)
CSIRO PUBLISHING Australian Journal of Chemistry
ALD features superb step coverage performance. The SEM images show
